Aerzen vacuum blowers with canned motor drive – series extended
07/31/2007
The new and successful canned motor blowers made by Aerzener Maschinenfabrik were extended by six additional series. The types GM 5500 CM-C, GM 7500 CM-C, GM 8000 CM-C and GM 9500 CM-C supplement the series with a theoretical intake volume of 5.500 m³/h up to 15.330 m³/h in the upper volume flow range. Furthermore the new vacuum pumps with smaller motor sizes and a drive capacity from 11 kW up to 14 kW are especially designed for continuous operation in process chambers. In this application only lower mechanical load capacities of up to 40 mbar are required, which makes it possible to use smaller and consequently more economical canned motors. Another advantage is the reduction of the assembly dimensions depending on the size by up to 280 mm.
The new sizes GM 2000 CM-CS and GM 2800 CM-CS are also designed for continuous operation in process chambers, above all for semiconductor technology. With a speed of max. 100 c/s the machine types achieve volume flows of 4.000 m³/h or 5.000 m³/h. Here also the nominal motor rating could be reduced to 5,6 kW. Besides the saving of costs for the canned motor blower additional saving potentials by the possible use of smaller frequency converter sizes result. Furthermore in the semiconductor technology there is a trend to smaller pumping systems, which is taken into consideration already now by the new Aerzen sizes with a reduction of the length by 140 mm or 200 mm.
The Aerzen canned motor blowers cover with a total of 14 sizes nominal intake volume flows from 105 m³/h to 15.330 m³/h and pressure ranges up to absolute pressures of 10–5 mbar. They find special application in the industrial vacuum technology, but also for reactive gases in e.g. semi-conductor technology, micro-electronics, manufacture of flat screens, solar technology and others.
The Aerzen vacuum blowers are distinguished by O-ring sealings at the housing flanges, vacuum-tightness and air cooling of blower stage. As oil lubrication splash lubrication is applied. The selected oil is mineral and PFPE-oil which is applied in semiconductor technology.
The sealing of drive shaft is carried out by integrated canned motor, so that the shaft passage to atmosphere is not necessary any longer. The motor can be applied as high-frequency design with a maximum speed of 7.400 rpm (125 c/s) and a corresponding frequency converter or as system frequency design with a maximum speed of 2.970 rpm (50 c/s) resp. 3.565 rpm (60 c/s). The canned material consists of a special, corrosion-resistant stainless steel which had been tested successfully in a long-term material test with aggressive media of semi-conductor technology. Depending on type of process two different high-frequency motor variants can be applied: For continuous operation motors with a load of 20 to 50 mbar are available, for cyclic operation motors are used which have a load of up to 150 mbar, so that shorter pumping periods can be realized.
The main advantages of the new vacuum blowers are the optimum selection possibilities by the world’s biggest canned motor series as well as by 4 additional motor variants. The customer can select from a modular construction system the optimal blower-motor type for his application. Motors are available for system operation as well as high frequency motors for continuous (process application) or a cyclic (load lock application). In addition, Aerzen blowers distinguish from all others by a high mechanical load (up to 150 mbar) making possible a considerable decrease of pumping-out periods. The water cooling of the motor of Aerzen canned blowers also guarantees the application under clean-room conditions.
Person in charge:
Ralph Wilton
Marketing Manager
Phone: 610-380-6367
Fax: 610-380-0278
rwilton@aerzenusa.com
AERZEN USA CORPORATION
108 Independence Way
Coatesville, PA 19320
USA
www.aerzenusa.com